Our new Zeiss Gemini 560 scanning electron microscope has been delivered today!
The equipment acquisition has been made possible by funding from the European Union via the EFRE program (VwV EFRE FEIH 2021-2027), the State of Baden-Württemberg, and the DFG.
Nanotechnology is a driving force for scientific and technological progress. Photonic and quantum technology concepts have proven their potential in research and are increasingly transforming our lives in the areas of communication, optical technologies, (photovoltaic) energy generation, and numerous other fields. The step from research to application requires miniaturization and integration. The Microstructure Laboratory of the 4th Institute of Physics, as the central laboratory for micro- and nanostructuring (core facility), provides well over 20 large-scale devices for structuring and characterization, and is therefore of paramount importance in this context. Scanning electron microscopy for process control and to develop process understanding is essential for further success. EFRE supports us in the acquisition of an ultra-high resolution electron microscope to further foster this endeavor. Scanning electron microscopy (SEM) is of great importance as a high-resolution and material-specific characterization method, as every advance in structuring requires precise knowledge of the results. The focus here will be on metals and dielectrics in multilayer systems, the integration of quantum-optical components such as color centers in (nano)diamonds, the morphology and integration of organic and inorganic films such as perovskites, and so-called two-dimensional materials such as metal dichalcogenides.
